BSI 20/30400316 DC:2020 Edition

This International Standard specifies spectroscopic ellipsometry (SE) for determination of optical properties (refractive index n and extinction coefficient k) and the optical classification of different types of amorphous carbon films within the n-k plane.

Amorphous carbon films may be deposited by ionized evaporation, sputtering, arc deposition, plasma-assisted chemical vapour deposition, hot filament techniques and others. Amorphous carbon films have an amorphous structure, containing both sp² and sp³ bonded carbon, and contain in some cases also hydrogen. There is graphite-like carbon as well as polymer-like, glass-like and diamond-like carbon films. Carbon films modified with metals, silicon and amorphous carbon films that have a gradient of composition/property in the thickness are not included. Paints and Varnishes are not included.

As amorphous carbon films show a huge diversity of structure and properties, it is indispensable to select the appropriate type of amorphous carbon film to exploit their excellent properties in practical use. Therefore, carbon films are characterized by spectroscopic ellipsometry under reasonable conditions. This enables classification of amorphous carbon films on silicon wafers within the n-k plane acting as process fingerprint.