{"id":233674,"date":"2024-10-19T15:14:12","date_gmt":"2024-10-19T15:14:12","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-en-62047-252016\/"},"modified":"2024-10-25T09:44:41","modified_gmt":"2024-10-25T09:44:41","slug":"bs-en-62047-252016","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-en-62047-252016\/","title":{"rendered":"BS EN 62047-25:2016"},"content":{"rendered":"

IEC 62047-25:2016 specifies the in-situ testing method to measure the bonding strength of micro bonding area which is fabricated by micromachining technologies used in silicon-based micro-electromechanical system (MEMS). This document is applicable to the in-situ pull-press and shearing strength measurement of the micro bonding area fabricated by microelectronic technology process and other micromachining technology.<\/p>\n

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
6<\/td>\nEnglish
CONTENTS <\/td>\n<\/tr>\n
8<\/td>\nFOREWORD <\/td>\n<\/tr>\n
10<\/td>\n1 Scope
2 Normative references
3 Terms and definitions <\/td>\n<\/tr>\n
11<\/td>\n4 Requirements
4.1 Testing structure design requirements
Figures
Figure 1 \u2013 Pull-press testing structure <\/td>\n<\/tr>\n
12<\/td>\nFigure 2 \u2013 Shearing testing structure <\/td>\n<\/tr>\n
13<\/td>\n4.2 Testing structure fabrication requirements
4.3 Testing environment requirements
5 Testing method
5.1 General
5.2 Pull-press testing method
5.2.1 Imposing the loading force
5.2.2 Pull-press testing method operation process <\/td>\n<\/tr>\n
14<\/td>\n5.2.3 Pull-press testing method result process
5.3 Shearing testing method
5.3.1 Shearing testing method operation process
Figure 3 \u2013 Pull-press testing method operation process <\/td>\n<\/tr>\n
15<\/td>\nFigure 4 \u2013 Shearing testing method operation process <\/td>\n<\/tr>\n
16<\/td>\n5.3.2 Shearing testing method result process
Tables
Table 1 \u2013 Dimensions for shearing testing structure <\/td>\n<\/tr>\n
17<\/td>\nAnnex A (informative) Dimensions for testing structure and tensile\/compressive strength
A.1 Dimensions for testing structure
A.2 Tensile strength and compressive strength
Table A.1 \u2013 Dimensions for testing structure
Table A.2 \u2013 Tensile strength and compressive strength (bonding area: 10 \u00b5m x 10 \u00b5m) <\/td>\n<\/tr>\n
18<\/td>\nTable A.3 \u2013 Tensile strength and compressive strength (bonding area: 20 \u00b5m x 20 \u00b5m)
Table A.4 \u2013 Tensile strength and compressive strength (bonding area: 30 \u00b5m x 30 \u00b5m) <\/td>\n<\/tr>\n
19<\/td>\nTable A.5 \u2013 Tensile strength and compressive strength (bonding area: 40 \u00b5m x 40 \u00b5m)
Table A.6 \u2013 Tensile strength and compressive strength (bonding area: 50 \u00b5m x 50 \u00b5m)
Table A.7 \u2013 Tensile strength and compressive strength (bonding area: 60 \u00b5m x 60 \u00b5m) <\/td>\n<\/tr>\n
20<\/td>\nTable A.8 \u2013 Tensile strength and compressive strength (bonding area: 70 \u00b5m x 70 \u00b5m)
Table A.9 \u2013 Tensile strength and compressive strength (bonding area: 80 \u00b5m x 80 \u00b5m) <\/td>\n<\/tr>\n
21<\/td>\nTable A.10 \u2013 Tensile strength and compressive strength (bonding area: 90 \u00b5m x 90 \u00b5m)
Table A.11 \u2013 Tensile strength and compressive strength(bonding area: 100 \u00b5m x 100 \u00b5m) <\/td>\n<\/tr>\n
22<\/td>\nTable A.12 \u2013 Tensile strength and compressive strength(bonding area: 110 \u00b5m x 110 \u00b5m)
Table A.13 \u2013 Tensile strength and compressive strength(bonding area: 120 \u00b5m x 120 \u00b5m) <\/td>\n<\/tr>\n
23<\/td>\nTable A.14 \u2013 Tensile strength and compressive strength(bonding area: 130 \u00b5m x 130 \u00b5m)
Table A.15 \u2013 Tensile strength and compressive strength(bonding area: 140 \u00b5m x 140 \u00b5m) <\/td>\n<\/tr>\n
24<\/td>\nTable A.16 \u2013 Tensile strength and compressive strength(bonding area: 150 \u00b5m x 150 \u00b5m) <\/td>\n<\/tr>\n
25<\/td>\nAnnex B (informative) Pull-press testing method example
B.1 Dimensions for testing structure
B.2 Tensile strength and compressive strength
Table B.1 \u2013 Dimensions for testing structure
Table B.2 \u2013 Tensile strength and compressive strength (bonding area: 110 \u00b5m x 110 \u00b5m) <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

Semiconductor devices. Micro-electromechanical devices – Silicon based MEMS fabrication technology. Measurement method of pull-press and shearing strength of micro bonding area<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
BSI<\/b><\/a><\/td>\n2016<\/td>\n28<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":233680,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[577,2641],"product_tag":[],"class_list":{"0":"post-233674","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-31-080-99","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/233674","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/233680"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=233674"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=233674"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=233674"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}