{"id":409720,"date":"2024-10-20T05:36:57","date_gmt":"2024-10-20T05:36:57","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/bs-iec-62047-422022\/"},"modified":"2024-10-26T10:18:55","modified_gmt":"2024-10-26T10:18:55","slug":"bs-iec-62047-422022","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/bsi\/bs-iec-62047-422022\/","title":{"rendered":"BS IEC 62047-42:2022"},"content":{"rendered":"

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
2<\/td>\nundefined <\/td>\n<\/tr>\n
3<\/td>\nCONTENTS <\/td>\n<\/tr>\n
5<\/td>\nFOREWORD <\/td>\n<\/tr>\n
7<\/td>\n1 Scope
2 Normative references
3 Terms and definitions <\/td>\n<\/tr>\n
8<\/td>\n4 Test bed of MEMS piezoelectric thin film
4.1 General
Figures
Figure 1 \u2013 Test bed of piezoelectric MEMS unimorph cantilever <\/td>\n<\/tr>\n
9<\/td>\nTables
Table 1 \u2013 Symbols and designations of test bed <\/td>\n<\/tr>\n
10<\/td>\n4.2 Functional blocks and components
4.2.1 General
Figure 2 \u2013 Setup for measurement of converse piezoelectric effect <\/td>\n<\/tr>\n
11<\/td>\n4.2.2 Displacement meter
4.2.3 Power source
4.2.4 Electric measurement instrument
Figure 3 \u2013 Setup for measurement of direct piezoelectric effect <\/td>\n<\/tr>\n
12<\/td>\n5 Microcantilever under testing
5.1 General
5.2 Measurement principle <\/td>\n<\/tr>\n
13<\/td>\n5.3 Measuring procedures of converse transverse piezoelectric coefficient
5.4 Measuring procedures of direct transverse piezoelectric coefficient <\/td>\n<\/tr>\n
14<\/td>\n6 Test report <\/td>\n<\/tr>\n
16<\/td>\nAnnex A (informative) Example of measuring method of piezoelectric MEMS cantilever
A.1 General
A.2 Measurement procedure
A.2.1 Structure of piezoelectric microcantilevers
A.2.2 Microfabrication process
Figure A.1 \u2013 Structure and photograph of piezoelectric microcantilevers under testing <\/td>\n<\/tr>\n
17<\/td>\nA.2.3 Mechanical properties of piezoelectric and non-piezoelectric layers
Figure A.2 \u2013 Fabrication process of piezoelectric microcantilevers
Table A.1 \u2013 Mechanical properties of piezoelectric layer <\/td>\n<\/tr>\n
18<\/td>\nA.2.4 Electric properties and resonance frequency of microcantilever
Table A.2 \u2013 Mechanical properties of non-piezoelectric layer
Table A.3 \u2013 Electric properties of microcantilever
Table A.4 \u2013 Resonance frequencies of microcantilever <\/td>\n<\/tr>\n
19<\/td>\nA.2.5 Input displacement of microcantilever for direct piezoelectric coefficient ed31,f
Figure A.3 \u2013 Frequency response of tip displacementof each piezoelectric microcantilevers
Table A.5 \u2013 Input displacement for direct piezoelectric coefficient ed31,f <\/td>\n<\/tr>\n
20<\/td>\nA.3 Measurement results
A.3.1 Converse piezoelectric measurement
A.3.2 Direct piezoelectric measurement
Figure A.4 \u2013 Tip displacement and converse piezoelectric coefficient as a function of applied voltage
Figure A.5 \u2013 Direct piezoelectric coefficient as a function ofinput tip displacement of piezoelectric microcantilevers <\/td>\n<\/tr>\n
21<\/td>\nA.4 Test report
Table A.6 \u2013 Test report <\/td>\n<\/tr>\n
23<\/td>\nBibliography <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

Semiconductor devices. Micro-electromechanical devices – Measurement methods of electro-mechanical conversion characteristics of piezoelectric MEMS cantilever<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
BSI<\/b><\/a><\/td>\n2022<\/td>\n24<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":409728,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[577,2641],"product_tag":[],"class_list":{"0":"post-409720","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-31-080-99","7":"product_cat-bsi","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/409720","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/409728"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=409720"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=409720"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=409720"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}