{"id":7792,"date":"2024-10-16T19:18:14","date_gmt":"2024-10-16T19:18:14","guid":{"rendered":"https:\/\/pdfstandards.shop\/product\/uncategorized\/astm-e2245-2005\/"},"modified":"2024-10-24T10:55:17","modified_gmt":"2024-10-24T10:55:17","slug":"astm-e2245-2005","status":"publish","type":"product","link":"https:\/\/pdfstandards.shop\/product\/publishers\/astm\/astm-e2245-2005\/","title":{"rendered":"ASTM-E2245 2005"},"content":{"rendered":"<\/p>\n

1.1 This test method covers a procedure for measuring the compressive residual strain in thin films. It applies only to films, such as found in microelectromechanical systems (MEMS) materials, which can be imaged using an interferometer. Measurements from fixed-fixed beams that are touching the underlying layer are not accepted.<\/p>\n

1.2 This test method uses a non-contact optical interferometer with the capability of obtaining topographical 3-D data sets. It is performed in the laboratory.<\/p>\n

1.3 This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety and health practices and determine the applicability of regulatory limitations prior to use.<\/i><\/p>\n

PDF Catalog<\/h4>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
PDF Pages<\/th>\nPDF Title<\/th>\n<\/tr>\n
1<\/td>\nScope
Referenced Documents
Terminology <\/td>\n<\/tr>\n
3<\/td>\nSummary of Test Method <\/td>\n<\/tr>\n
4<\/td>\nSignificance and Use
FIG. 1
FIG. 2 <\/td>\n<\/tr>\n
5<\/td>\nInterferences
FIG. 3
FIG. 4 <\/td>\n<\/tr>\n
6<\/td>\nTest Units
FIG. 5
FIG. 6
TABLE 1 <\/td>\n<\/tr>\n
9<\/td>\nFIG. 7 <\/td>\n<\/tr>\n
11<\/td>\nReport
Precision and Bias
TABLE 2 <\/td>\n<\/tr>\n
12<\/td>\nFIG. 8
FIG. 9 <\/td>\n<\/tr>\n
13<\/td>\nKeywords
A1. CALCULATION OF COMBINED STANDARD UNCERTAINTY
A1.1 <\/td>\n<\/tr>\n
14<\/td>\nA1.2 <\/td>\n<\/tr>\n
15<\/td>\nX1. MODIFICATIONS TO THE PROCEDURE FOR A BULK-MICROMACHINED FIXED-FIXED BEAM OR A SURFACE-MICROMACHINED FIXED-FIXED BEAM WITH TRANSITIONAL EDGES GREATER THAN 8 \u00b5m IN HEIGHT
X1.1
X1.2
X1.3
X1.4
X1.5
FIG. X1.1 <\/td>\n<\/tr>\n
16<\/td>\nFIG. X1.2
FIG. X1.3 <\/td>\n<\/tr>\n
17<\/td>\nX1.6
X1.7
X2. ADHERENCE OF SURFACE-MICROMACHINED FIXED-FIXED BEAM TO UNDERLYING LAYER
X2.1
FIG. X2.1 <\/td>\n<\/tr>\n
18<\/td>\nFIG. X2.2
FIG. X2.3 <\/td>\n<\/tr>\n
19<\/td>\nREFERENCES
FIG. X2.4 <\/td>\n<\/tr>\n<\/table>\n","protected":false},"excerpt":{"rendered":"

E2245-05 Standard Test Method for Residual Strain Measurements of Thin, Reflecting Films Using an Optical Interferometer<\/b><\/p>\n\n\n\n\n
Published By<\/td>\nPublication Date<\/td>\nNumber of Pages<\/td>\n<\/tr>\n
ASTM<\/b><\/a><\/td>\n2005<\/td>\n20<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n","protected":false},"featured_media":7793,"template":"","meta":{"rank_math_lock_modified_date":false,"ep_exclude_from_search":false},"product_cat":[714,2637],"product_tag":[],"class_list":{"0":"post-7792","1":"product","2":"type-product","3":"status-publish","4":"has-post-thumbnail","6":"product_cat-37-040-20","7":"product_cat-astm","9":"first","10":"instock","11":"sold-individually","12":"shipping-taxable","13":"purchasable","14":"product-type-simple"},"_links":{"self":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product\/7792","targetHints":{"allow":["GET"]}}],"collection":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product"}],"about":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/types\/product"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media\/7793"}],"wp:attachment":[{"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/media?parent=7792"}],"wp:term":[{"taxonomy":"product_cat","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_cat?post=7792"},{"taxonomy":"product_tag","embeddable":true,"href":"https:\/\/pdfstandards.shop\/wp-json\/wp\/v2\/product_tag?post=7792"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}